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| Part I Experimental Realization | ||
| 1 | Elements for Designing an X-Ray Diffraction Experiment | 5 |
| 1.1 | X-Ray Sources | 5 |
| 1.2 | Optical Elements | 11 |
| 1.3 | Detectors | 23 |
| 2 | Diffractometers and Reflectometers | 31 |
| 2.1 | X-Ray Reflectometers | 32 |
| 2.2 | High-Resolution Diffractometer | 37 |
| 2.3 | Limits of the Use of Powder Diffractometers | 39 |
| 2.4 | Grazing-Incidence Diffraction | 40 |
| 3 | Scans and Resolution in Angular and Reciprocal Space | 43 |
| 3.1 | Coherence of Radiation and Correlation of Sample Properties | 44 |
| 3.2 | Scans Across the Reciprocal Space | 47 |
| 3.3 | Resolution Elements | 51 |
| Part II Basic Principles | ||
| 4 | Basic Principles | 63 |
| 4.1 | Description of the X-Ray Waveheld in Vacuum | 63 |
| 4.2 | General Description of the Scattering Process | 65 |
| 4.3 | Direction of Scattered Waves | 68 |
| 5 | Kinematical Theory | 75 |
| 5.1 | Scattering From a Perfect Layer | 75 |
| 5.2 | Two-Beam Approximation | 81 |
| 5.3 | Kinematical Scattering From Deformed Crystals | 85 |
| 5.4 | Kinematical Scattering Prom Multilayers | 87 |
| 5.5 | Kinematical Scattering From Randomly Deformed Crystals | 91 |
| 6 | Dynamical Theory | 97 |
| 6.1 | The Wave Equation for a Periodic Medium | 97 |
| 6.2 | Boundary Conditions | 99 |
| 6.3 | X-Ray Reflection | 102 |
| 6.4 | Two-Beam Diffraction | 104 |
| 6.5 | Layered Samples | 112 |
| 6.5.1 | Multilayers: X-Ray Reflection | 116 |
| 6.5.2 | Multilayers: Conventional X-Ray Diffraction | 117 |
| 6.6 | A Comment on the Three-Beam Diffraction | 119 |
| 7 | Semikinematical Theory | 123 |
| 7.1 | Basic Formulas | 123 |
| 7.2 | Examples | 125 |
| 7.2.1 Small-Angle Scattering from Empty Holes in a | ||
| Semi-infinite Matrix | 125 | |
| 7.2.2 Small-Angle Scattering from Pyramidal Islands | ||
| Randomly Placed on a Flat Surface | 128 | |
| 7.2.3 Diffuse Scattering in Diffraction from Empty Holes in | ||
| a Crystal | 129 | |
| 7.2.4 Diffraction from a Thin Layer on a Semi-infinite | ||
| Substrate | 132 | |
| Part III Solution of Experimental Problems | ||
| 8 Determination of Layer Thicknesses of Single Layers and | ||
| Multilayers | 143 | |
| 8.1 | X-Ray Reflection by Single Layers | 144 |
| 8.2 | X-Ray Reflection by Periodical Multilayers | 153 |
| 8.3 | Coplanar X-Ray Diffraction by Single Layers | 161 |
| 8.4 | Coplanar X-Ray Diffraction by Periodical Superlattices | 166 |
| 8.5 | X-Ray Grazing Incidence Diffraction | 171 |
| 8.6 | Buried Layers | 174 |
| 9 Lattice Parameters and Strains in Epitaxial Layers and | ||
| Multilayers | 179 | |
| 9.1 | Conventional Coplanar Diffraction | 179 |
| 9.2 | Reciprocal-Space Mapping | 190 |
| 9.3 | Coplanar Extremely Asymmetric Diffraction | 193 |
| 9.4 | Utilization of Anomalous Scattering Effects | 197 |
| 9.5 | Grazing-Incidence Diffraction | 198 |
